A compact MEMS gravimeter with sub ng performance

We present the performance of a MEMS accelerometer capable of sub-migroGal Allan variance out to a period of 1000 s. The gravimeter incorporates a monocrystalline silicon suspension and capacitive sensing with electromagnetic feedback. The gravimeter is capable of operation over 10 degree tilt range under Earth gravity, allowing unsupervised operation after remote deployment with a three-axis gapleran geometry. The suspension incorporates temperature compensation to minimse the need for thermal isolation.  The overall mass of the instrument is about 0.6 kg mass,  including the packaged sensor heads, the electronics board and associated connectors and cabling with a power requirement of less than 400 mW.  The performance and resource profile make this a promising instrument for both terrestrial deployment in extreme environments as well as planetary deployment.